Microtronic, maker of superior macro defect inspection programs and software program, has introduced a handy and extremely exact solution to monitor the weights of semiconductor wafers similtaneously defects are being inspected – all on a single device. This patented functionality is known as WaferWeight and it integrates absolutely into Microtronic’s EAGLEview™ line of high-speed macro defect inspection programs. It may be added to the most recent EAGLEview 6 and likewise to earlier fashions of the device.
Picture Credit score: Microtronic
“Wafer mass metrology has develop into more and more necessary as semiconductor processes have develop into extra advanced and delicate,” mentioned Microtronic CEO Reiner Fenske in making the announcement. “As we speak’s fabs would love to have the ability to measure the wafer mass modifications that happen throughout processing, particularly in deposition, etch, plating, backgrinding, bonding, TSV, and comparable steps. Nevertheless, earlier wafer weight measurement strategies have been gradual and costly, requiring a separate device. Now, WaferWeight permits fabs to trace wafer mass rapidly, precisely, and economically – concurrently with macro defect inspection. Our EAGLEview can do defect inspection and wafer weighing each on the similar time, on a single system.”
“And throughput pace performs a vital position on this course of,” Fenske added. “As a way to monitor modifications in wafer weight, fabs really want to acquire knowledge from each single wafer in each single lot. It’s the distinctive pace of the EAGLEview that makes this potential. Which is why many top-tier fabs around the globe have already chosen to include our WaferWeight functionality.”
The brand new WaferWeight measurements could have a decision as little as 0.1mg. This permits exact monitoring of modifications in wafer mass between course of steps – and likewise between totally different wafers in loads. Monitoring wafer weight at varied factors all through processing will be invaluable for locating sure course of issues that can not be detected visually. A wafer weight change that exceeds allowable ranges can instantly flag a problem that wants additional inspection or correction. Complete wafer weight info can be included in SPC programs to boost the precision and high quality of a fab’s course of monitoring general.
WaferWeight info can all be saved in EAGLEview’s highly effective ProcessGuard™ software program. This method maintains a database of knowledge on each wafer run by way of the device – by lot, date and time. It may well mechanically randomize wafers and observe incoming and outgoing slot positions of each wafer. ProcessGuard’s built-in Slot-Positional Evaluation Instrument can plot and evaluate a spread of wafer info, together with wafer weight. It may well present wafer weights and pre/put up course of weight deltas for each slot place.
